一种紧凑结构型干涉仪的设计

设计了一种基于立体角镜与固定平面镜组合的紧凑结构型干涉仪系统，分析其光学系统，得到各器件的影响与设计指标。对动镜驱动系统进行设计与分析，并通过PID算法进行调速，确保动镜运动的准直、匀速与平稳。实验表明仪器的波数精度、分辨率、信噪比等关键指标能够满足实际应用的需要。

Design of A Compact Structure Interferometer

A novel interferometer system based on the combinations of cube-corner reflectors and fixed plane mirrors was designed, the moving mirror drive system was designed and analysed, and its governor PID algorithm was used to ensure that the movement of the moving mirror is collimated, uniform and smooth. The parameters of the optical system of the interferometer and the optical devices were described. Finally, after validation of the experiment, it was indicated that the wave number accuracy, resolution, signal to noise ratio and other key indicators can meet the needs of practical application.