倾斜入射楔形薄膜滤光片的透射光谱研究

角度调谐薄膜滤光片因较大的波长调谐特性和良好的矩形度在密集波分复用系统中得到了广泛的应用。在倾斜入射时薄膜滤光片透射光谱的透射率和半宽不仅受到入射角度的影响，还跟滤光片两端面间的非平行度即楔角的大小有关。详细分析了楔角对对滤光片透射率以及半宽的影响，发现适当的楔角和角度取向能够改善倾斜入射状态下滤光片的透射光谱特性。设计制备了楔角为0.8°的楔形薄膜角度调谐滤光片，实验结果证明保持该楔角的方向与倾斜入射角度相同时会严重的劣化透射光谱的透射率和矩形度，方向相反时则可以提高光谱的透射率以及矩形度，并使器件的波长调谐范围增大约10 nm。

Research on the Transmittance Spectrum of Wedge Thin Film Filter with Oblique Incidence

Angle-tuned thin film filter is widely used in the DWDM system for its broad tunable wavelength range and high rectangular degree. The transmissivity and the half bandwidth is greatly influenced not only by the incident angle, but also by the wedge angle of the non-paralleled thin film filter. In the present paper, the influences of the wedge angle on the transmissivity and the half bandwidth were detailedly analyzed. The proper wedge angle and the orientation can greatly improve the characteristics of the transmittance spectrum. The angle-tuned thin film filter with 0.8°wedge angle was also fabricated. The experimental results show that keeping the wedge angle with the same orientation to the incident angle will worsen the transmissivity and the rectangular degree of the transmittance spectrum. However, keeping the wedge angle orientation reverse to the incident angle will greatly enhance the transmissivity and the rectangular degree of the filter and its tunable wavelength range will broaden by 10 nm.