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Development of MEMS-based direct methanol fuel cell with high power density using nanoimprint technology
Institution:1. Networked MEMS Technology Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Namiki 1-2-1, Tsukuba, Ibaraki 305-8564, Japan;2. Nano-Energy Materials Group, Energy Technology Institute, National Institute of Advanced Industrial Science and Technology (AIST), Umezono 1-1-1, Tsukuba, Ibaraki 305-8568, Japan;1. Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA;2. SUNCAT Center for Interface Science and Catalysis, SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, CA 94025, USA;1. JOANNEUM RESEARCH, Forschungsgesellschaft mbH, Leonhardstrasse 59, 8010 Graz, Austria;2. Swiss Center for Electronics and Microtechnology, CSEM SA, Tramstrasse 99, 4132 Muttenz, Switzerland;3. Obducat Technologies AB, Scheelevägen 2, SE-223 63 Lund, Sweden;4. Fraunhofer EMFT, Hansastrasse 27 d, 80686 München, Germany;5. imec, Kapeldreef 75, B-3001 Leuven, Belgium;6. Institute of Mechanical and Manufacturing Engineering, Cardiff University, Cardiff CF24 3AA, Wales, UK;7. BASF Schweiz AG, Areal Rosental, Schwarzwaldallee 215, 4057 Basel, Switzerland;8. Graz Centre for Electron Microscopy and Institute for Electron Microscopy and Nanoanalysis, TU Graz, Steyrergasse 17, 8010 Graz, Austria;1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1201, Japan;2. Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba 305-8564, Japan;3. Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Nakaku, Sakai, Osaka 599-8531, Japan;4. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan;5. JST-CREST, 5 Sambancho, Chiyoda, Tokyo 102-0075, Japan;1. CICECO - Aveiro Institute of Materials, Department of of Materials and Ceramic Engineering, University of Aveiro, 3810-193 Aveiro, Portugal;2. INNOVNANO, Materiais Avançados, SA, 3040-570 Antanhol, Portugal;3. NEG I.P., Laboratory of Energy, Solar Energy Unit, Estrada do Paço do Lumiar 22, 1649-038 Lisboa, Portugal;4. UIDM, ESTG, Polytechnic Institute of Viana do Castelo, 4900 Viana do Castelo, Portugal;5. CEMUC, Mechanical Engineering Department, University of Coimbra, Rua Luís Reis Santos, Coimbra 3030-788, Portugal;1. Fuel Cell System and Engineering Laboratory, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, 457 Zhongshan Road, Dalian, 116023, PR China;2. University of the Chinese Academy of Sciences, Beijing, 100039, PR China
Abstract:Performance of MEMS-based DMFC is low, because graphite-based porous electrodes show poor compatibility with MEMS technology. Nanoimprint technology was adopted in this paper to prepare fine pattern on proton exchange membrane (PEM) in MEMS-based DMFC as a promising alternative to the graphite-based porous electrodes. Micro-convex with the diameter of about 600 nm and the height of 50–70 nm was prepared on Nafion® 117 membrane by the nanoimprint at 130 °C using silicon mold. Thick Pt film (20 nm) was deposited as catalyst directly on the nanoimprinted Nafion® 117 membrane. Then the Pt-coated PEM was sandwiched with micro-channeled silicon plates to form a micro-DMFC. With passively feeding of 1 M methanol solution and air at room temperature, the as-prepared cell had the open circuit voltage (OCV) of 0.74 V and the maximum power density of 0.20 mW/cm2. The measured OCV was higher than those (0.1–0.3 V) of the state-of-the-art MEMS-based DMFC with planar electrode and pure Pt catalyst.
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