| Abstract: | High quality epitaxial YBa2Cu3O7-x thin films have been succcessfully prepared by dc magnetron sputtering deposition, on (100) and (110) aligned SrTiO3, LaAlO3 and yttria-stabilized zirconia (YSZ) substrates. The films showed zero resistance around 90 K and had a Jc (at 77 K, H=0) over 106A/cm2. It was found that superconducting properties and structures of the films were strongly dependent on oxygen pressure and substrate temperature. The epitaxial structure of the films have been studied by X-ray diffraction. Rutherford backscattering and channeling spectroscopy, X-ray double-crystal diffraction and transmission election microscopy. The experimental results demonstrated that the epitaxial YBa2Cu3O7-x films had excellent superconducting properties and quite perfect structure. |
