| 不同厚度三倍频SiO2增透膜的设计、制备与改性 |
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| 引用本文： | 张雨露,张欣向,业海平,晏良宏,江 波. 不同厚度三倍频SiO2增透膜的设计、制备与改性[J]. 无机化学学报, 2012, 28(1): 119-124 |
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| 作者姓名： | 张雨露 张欣向 业海平 晏良宏 江 波 |
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| 作者单位： | 1. 四川大学化学学院绿色化学与技术教育部重点实验室,成都,610064
2. 中国工程物理研究院激光聚变研究中心,绵阳,621900 |
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| 基金项目： | 四川大学中央高校基本科研业务 |
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| 摘 要： | 本文通过光学计算设计了具有不同厚度的三倍频增透膜。以氨水为催化剂、正硅酸乙酯(TEOS)为前驱体,通过溶胶-凝胶(Sol-Gel)技术制得SiO2溶胶;采用浸渍提拉法镀膜得到符合设计要求的三倍频增透膜。研究结果表明,增透膜的耐磨擦性能随着膜层厚度的增大而增大,本文制得的厚度达到200 nm以上的三倍频增透膜耐磨擦性能显著优于传统的1/4波长三倍频增透膜。此外,本文以甲基含氢硅油为膜表面修饰剂,提出一种全新的超快的表面疏水性改性的方法。经该方法处理后,增透膜由亲水膜转变为疏水膜,对水的接触角从23.4°增大至95°,增透膜的耐环境性显著提高。
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| 关 键 词： | 溶胶-凝胶技术 三倍频 增透膜 甲基含氢硅油 耐磨擦性 耐环境性 |
Design, Preparation and Modification of Third-Harmonic Silica Antireflective Coatings with Different Thickness |
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| ZHANG Yu-Lu,ZHANG Xin-Xiang,YE Hai-Ping,YAN Liang-Hong and JIANG Bo. Design, Preparation and Modification of Third-Harmonic Silica Antireflective Coatings with Different Thickness[J]. Chinese Journal of Inorganic Chemistry, 2012, 28(1): 119-124 |
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| Authors: | ZHANG Yu-Lu ZHANG Xin-Xiang YE Hai-Ping YAN Liang-Hong JIANG Bo |
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| Affiliation: | Key Laboratory of Green Chemistry & Technology, College of Chemistry, Sichuan University, Chengdu 610064, China,Key Laboratory of Green Chemistry & Technology, College of Chemistry, Sichuan University, Chengdu 610064, China,Key Laboratory of Green Chemistry & Technology, College of Chemistry, Sichuan University, Chengdu 610064, China,Research Center of Laser Fusion, China Academy of Engineering Physical, Mianyang, Sichuan 621900, China and Key Laboratory of Green Chemistry & Technology, College of Chemistry, Sichuan University, Chengdu 610064, China |
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| Abstract: | Third-harmonic antireflective (AR) coatings with different thickness were designed via optical formula in this work. Using tetraethylorthosilicate (TEOS) as precursor and ammonia as catalyst, SiO2 sol was prepared by sol-gel process. The designed AR coatings were obtained by dip-coating process. It is found that the abrasion-resistance of AR coatings increased with film thickness, indicating that the abrasion-resistance of third-harmonic AR coatings prepared in this work is much better than that of the traditional quarter-wave third-harmonic AR coating. In addition, a totally new and super-fast surface modification method was proposed by using methyl hydrogen silicone oil as modifier. The water contact angle of AR coating increased from 23.4° to 95° after the surface modification. |
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| Keywords: | Sol-Gel process third-harmonic antireflective coating methyl hydrogen silicone oil abrasion-resistance environment-resistance |
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