Specific features of morphology and the structure of nanocrystalline cubic silicon carbide films grown on a silicon surface |
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| Authors: | L K Orlov Yu N Drozdov V I Vdovin Yu I Tarasova and T N Smyslova |
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| Institution: | (1) Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul’yanova 46, Nizhni Novgorod, 603950, Russia;(2) Institute of Chemical Problems of Microelectronics, Bol’shoĭ Tolmachevskiĭ per. 5, Moscow, 119017, Russia;(3) Alekseev Nizhni Novgorod State Technical University, ul. Minina, 24, Nizhni Novgorod, 603600, Russia |
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| Abstract: | Physics of the Solid State - The composition, surface morphology, and crystal structure of nanocrystalline cubic silicon carbide films grown on a silicon surface through chemical conversion from... |
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