High precision phase measuring profilometry based on stereo microscope

A high-precision phase measuring profilometry (PMP) based on a stereo microscope is presented. A high-quality area modulation sinusoidal grating by a LED illumination is used to produce the high-quality sinusoidal fringes. Phase-shift technique is employed to get the phase distributions, and the 3D data could be reconstructed by the phase-height mapping algorithm easily. The accuracy depends on the field of view, which at a large magnification is below 1 μm. This setup will be promising for high accuracy measurement task.