| Abstract: | Ellipso-Height-Topometry, EHT, is an extended optical topometry, where both the topographies of the surface height H(x,y) and the ellipsometric local parameters Ψ(x,y) and Δ(x,y) of surfaces with locally changing materials are measured on the same pixel raster with high resolution and using the same data sets. Further quantities can be calculated from these measurements on the base of locally confined surface models: the local refractive index, the thickness t(x,y) of overlayers or films, or other parameters of layered systems. |
