Graphene/LiNbO3 surface acoustic wave device based relative humidity sensor |
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| Authors: | Y.J. Guo J. Zhang C. Zhao P.A. Hu X.T. Zu Y.Q. Fu |
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| Affiliation: | 1. School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, PR China;2. Thin Film Centre, Scottish Universities Physics Alliance (SUPA), University of the West of Scotland, Paisley PA1 2BE, UK;3. Key Lab of Microsystem and Microstructure, Harbin Institute of Technology, Harbin 150080, PR China |
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| Abstract: | This study described relative humidity (RH) sensing using a graphene/128° YX LiNbO3 surface acoustic wave (SAW) device. The resonant frequency of the device decreased in a two-stage manner as the RH increased. For a low RH range (RH < 50%), a frequency downshift of 1.38 kHz per 1% RH change was observed. This was attributed to mass loading of the SAW propagation surface due to the adsorption of water molecules by the graphene surface. For a high RH range (RH > 50%), a frequency downshift of 2.6 kHz per 1% RH change was obtained, which was due to the change in elastic grapheme properties. The mass loading effect of the water layer was less effective at high temperature, resulting in a lower temperature coefficient of resonant frequency (TCF). |
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| Keywords: | Graphene LiNbO3 SAW device Relative humidity TCF |
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