Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement |
| |
Authors: | P Hlubina D Ciprian J Lu
ek |
| |
Institution: | aDepartment of Physics, Technical University Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic |
| |
Abstract: | A spectral-domain white-light interferometric technique is used for measuring distances in a Michelson interferometer with a mirror represented by a thin-film structure (TFS) on a substrate. A fibre-optic spectrometer is employed for recording spectral interferograms that include wide wavelength range effects of dispersion in a cube beam splitter and multiple reflection within the TFS. Knowing the effective thickness of the beam splitter, its dispersion and parameters of the TFS and substrate, the positions of the second interferometer mirror are determined precisely by a least-squares fitting of the theoretical spectral interferograms to the recorded ones. We apply the technique to the beam splitter made of BK7 optical glass and to a uniform SiO2 thin film on a silicon wafer. We compare the results of the processing that include and do not include the effect of the TFS. |
| |
Keywords: | White light Spectral interferometry Thin-film structure Nonlinear phase function Distance |
本文献已被 ScienceDirect 等数据库收录! |