Monte Carlo方法计算低能电子作用下固体背散射电子发射及空间分布

应用Monte Carlo方法,对能量E₀≤5keV低能电子作用下固体Al、Cu、Ag、Au的背散射电子发射及表面空间分布作了计算.模型应用Mott散射截面及修正的Bethe方程分别描述低能电子在固体中的弹性和非弹性散射.计算了背散射电子能量分布、表面空间分布、深度分布和角分布规律及特征,还计算分析了背散射电子角分布与深度分布、表面空间分布及能量分布之间的关系,系统地描述了背散射电子的发射及分布规律.

EMISSION AND SPATIAL DISTRIBUTIONS OF BSEs IN SOLIDS UNDER THE ACTION OF LOW ENERGY ELECTRON BY MONTE CARLO SIMULATION

Using Monte Carlo method, both emission and spatial distributions of the backscattered electrons (BSEs) of the solids Al,Cu,Ag,Au under the action of low energy electrons with energy E₀ ≤ 5keV keV have been simulated and calculated. Mott cross section and the modified Bethe equation are used to describe the elastic and inelastic scattering of electrons in solids, respectively. The energy distribution, surface spatial distribution, depth distributioin in solids and angle distribution of BSEs have been obtained. The dependence of angle distribution of BSEs on the energy distribution, surface spatial distribution and depth distribution of BSEs are also calculated, describing the distribution regularity and emission of BSEs systematically.