Total analysis of surface structure and properties by UHV transfer system |
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Authors: | Hiroshi Yamatani |
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Institution: | Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama, Ikoma, Nara 630-0192, Japan |
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Abstract: | We have developed an ultrahigh-vacuum (UHV) complex sample preparation and analysis system, which realizes a reliable surface science analyzing various characters on an identical surface. The system contains three sample-preparation-and-characterization chambers and five analysis chambers. They are (1) an electronic-properties-characterization chamber, (2) a magnetic-properties-characterization chamber, (3) an organic-molecule chamber, (4) UHV SEM, (5) a high-energy-resolution angle-resolved photoelectron spectrometer, (6) a high-energy-resolution display-type spherical mirror analyzer, (7) a room-temperature (RT) STM, and (8) an optical-properties characterization chamber. A special sample holder is used with six electrodes on it, which enables accurate temperature measurement of a sample by connecting a thermocouple directly to the sample even if it is transferred. Four other electrodes can be used for construction of various circuits including evaporators. Some examples are shown. |
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Keywords: | Preparation Analysis UHV Photoelectron spectroscopy Display-type spherical mirror analyzer STM Sample transfer Sample holder |
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