Energy-filtered XPEEM with NanoESCA using synchrotron and laboratory X-ray sources: Principles and first demonstrated results |
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Authors: | O Renault N Barrett LF Zagonel JC Cezar K Winkler D Funnemann |
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Institution: | a CEA LETI-MINATEC, 17 rue des Martyrs, 38054 Grenoble Cedex 09, France b CEA-DSM/DRECAM/SPCSI, CEA Saclay, 91191 Gif sur Yvette, France c ESRF, 6, rue Jules Horowitz, BP220, 38043 Grenoble Cedex 09, France d Omicron NanoTechnology GmbH, Limburger Strasse 75, 65232 Taunnustein, Germany |
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Abstract: | The importance of energy filtering in PEEM-based imaging methods has been shown in recent years with the availability of powerful instruments. A new instrument, the NanoESCA, combines a fully electrostatic PEEM column and an aberration corrected double hemispherical analyser as energy filter. This paper reports on recently demonstrated XPEEM results using the first commercially available NanoESCA instrument operated with both synchrotron soft X-rays and monochromatic laboratory Al Kα radiation. The implementation of elemental and bonding-state specific imaging is shown with both excitation sources. The presently achieved (but not yet ultimate) lateral resolutions on energy filtered core-level images are 150 nm with a large synchrotron spot and below 1 μm with a focused laboratory source. To date this is the unique example of laboratory XPEEM core-level imaging. |
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Keywords: | PEEM Energy filter NanoESCA Synchrotron Al Kα radiation X-ray photoelectron spectroscopy |
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