四探针测量任意方形样品电阻率的修正因子

采用三维无限电像分布,推导了?点接触、任意形状排列探针测量任意大小方形样品电阻率的普遍表达式,作为特例,计算了点接触直线四探针的修正因子,并与实验比较,结果表明所推导的公式可准确计算任意大小方形材料的电阻率;当样品边界与探针的距离都大于探针间距四倍时,可近似看作半无穷大样品。

Correction Factors of Four Probes Method for Resistivity Measurement of Arbitrary Cuboid Semiconductor Materials

The general correction factor equation of four probes, which are non-point-contact and arbitrary array, for resistivity measurement of arbitrary size cuboid semiconductor materials has beea derived in consideration of infinite three-dimensional array of electric images. As an example, the correction factors of the in-line four-point probes have been calculated. The calculated results are consistent with the experimtntal data. If the distance between the boundary of cuboid sample and probe is four times more than that between probes, the affect of the boundary on measurement results can be neglected and the sample can be treated as semi-infinite sample.