一种全场三维共焦检测的新方法

提出了一种利用微光学阵更合成器件实现全场三维面形并行检测、记录的共焦方法。此方法的关键是，在共焦系统中引入一一微光学耻列合成器件来产生一点光源阵列，实现了对同一一剖面同时并行检测，并首次采用了ＣＣＤ面阵像元取代上孔光阑直接截取三维信息光强。本文讨论了该方法的三信息检测原理，响应关系，给出了初步的实验结果和三维重构图。

A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography

A confocal method for measuring whole—field 3-D surface topography,which employs a micro—optic component to realize parallel measuring and reco rding is proposed. An array of point light sources produced by the micro-optic compo nent is used to detect one of the confocal plane series simultaneously. And as an alternative to a pinhole diaphragm, the pixels on the CCD plane directly capture and register the 3-D information intensities from the detected planes. The principle and the depth response relation of the method are discussed, and the primary experimental results and a 3-D reconstructed image ape given.