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EDX depths analysis of MIS-structures |
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| Authors: | Hans -Joachim Fitting Jan -Christian Kuhr Michael Goldberg Bärbel Becher Torsten Barfels |
| Affiliation: | (1) Fachbereich Physik der Universität Rostock, Universitätsplatz 3, D-18051 Rostock, Federal Republic of Germany |
| Abstract: | Based on experimental energy transfer distributionsdE/dx including the X-ray depth distribution function  (x,E0,Z) an  effective-layer method has been developed in order to homogenize a multilayer target. Effective layer thicknesses are related to real layer thicknesses by means of equal transmission-energy rates. This method has been proved by EDX measurements of Au-SiO2-Si structures showing good agreement with the real structures.Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday |
| Keywords: | electron probe microanalysis X-ray depth distribution function depth resolution effective-layer method MIS-structures |
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