| Structural and Optical Properties of Zinc Nitride Films Prepared by Pulsed Filtered Cathodic Vacuum Arc Deposition |
| |
| 作者姓名： | SENADIM TUZEMEN Ebru KAVAK Hamide ESEN Ramazan |
| |
| 作者单位： | [1]Department of Physics, Cumhuriyet University, 58140 Sivas, Turkey [2]Department of Physics, Qukurova University, 01330 Adana, Turkey |
| |
| 基金项目： | Supported by the Scientific and Technological Research Council of Turkey under Grant No 106T613, and the Research Found of University of Cukurova under Grant No 2004K120360-7. |
| |
| 摘 要： | Polycrystalline zinc nitride films are deposited on Coming 7059 glass substrates by pulsed filtered cathodic vacuum arc deposition （PFCVAD）. The crystallographic structure is studied by means of x-ray diffraction. These measurements show that all the films are crystallized in the cubic structure, in a preferred orientation along the （332） and （631） directions. Weak XRD signal shows small crystallites distributed in an amorphous tissue. A small improvement of crystallinity is observed with annealing. Optical parameters such as absorption, energy band gap, Urbach tail, extinction coefficients have been determined. The Urbach tail energy is decreased with annealing at 500℃ for one hour. Energy band gap values are found to be increased by annealing.
|
| 关 键 词： | 氮化物薄膜 结构 光学性质 脉冲滤波器 |
| 收稿时间： | 2007-07-03 |
Structural and Optical Properties of Zinc Nitride Films Prepared by Pulsed Filtered Cathodic Vacuum Arc Deposition |
| |
| SENADIM TUZEMEN Ebru KAVAK Hamide ESEN Ramazan.Structural and Optical Properties of Zinc Nitride Films Prepared by Pulsed Filtered Cathodic Vacuum Arc Deposition[J].Chinese Physics Letters,2007,24(12):3477-3480. |
| |
| Authors: | SENADIM TUZEMEN Ebru KAVAK Hamide ESEN Ramazan |
| |
| Institution: | Department of Physics, Cumhuriyet University, 58140 Sivas, TurkeyDepartment of Physics, \c Cukurova University, 01330 Adana, Turkey |
| |
| Abstract: | Polycrystalline zinc nitride films are deposited on Corning 7059 glass substrates by pulsed filtered cathodic vacuum arc deposition (PFCVAD). The crystallographic structure is studied by means of x-ray diffraction. Thesemeasurements show that all the films are crystallized in the cubic structure, in a preferred orientation along the (332) and (631) directions. Weak XRD signal shows small crystallites distributed in an amorphous tissue. A small improvement of crystallinity is observed with annealing. Optical parameters such as absorption, energy band gap, Urbach tail, extinction coefficients have been determined. The Urbach tail energy is decreased with annealing at 500°C for one hour. Energy band gap values are found to be increased byannealing. |
| |
| Keywords: | 61 10 Nz 74 25 Gz 78 55 Et |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《中国物理快报》浏览原始摘要信息 |
| 点击此处可从《中国物理快报》下载免费的PDF全文 |
