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光电变色器件用纳米晶氧化钛薄膜的微结构与特性
引用本文:唐洁影,张旭苹,孟莉莉. 光电变色器件用纳米晶氧化钛薄膜的微结构与特性[J]. 光学学报, 2003, 23(12): 502-1506
作者姓名:唐洁影  张旭苹  孟莉莉
作者单位:1. 东南大学微电子机械系统教育部重点实验室,南京,210096
2. 南京大学光通信工程研究中心,南京,210093
基金项目:国家自然科学基金 (699780 0 3 )资助课题
摘    要:纳米晶TiO2薄膜在光电变色器件中具有很重要的作用。它的微结构直接影响染料的吸附、光的散射以及电荷输运的特性。因此,探索TiO2薄膜的微结构(如粒径、表面形貌和厚度等)及光电性能是非常有意义的。采用电子束蒸发工艺制备了光电变色器件用纳晶TiO2薄膜,利用原子力显微镜、X射线衍射、俄歇电子能谱等手段对纳米晶TiO2薄膜的表面形貌、结晶状态及组分进行了分析。从理论上研究和讨论了纳米晶TiO2薄膜晶粒尺寸对光电性能的影响,并用量子限制效应解释了吸收光谱峰值波长随粒径减小而发生蓝移的现象。

关 键 词:薄膜物理 光电变色器件 二氧化钛 纳米晶 薄膜微结构 俄歇电子能谱 X射线衍射
收稿时间:2003-05-16

Microstructure and Characteristics of Nanocrystalline TiO2 Thin Films for Photoelectrochromic Devices
Tang JieyingZhang XupingMeng Lili Key Laboratory of Micro-Electro-Mechanical Systems of Education Ministry of China,Southeast University,Nanjing Research Center of Optical Communication Engineering,Nanjing University,Nanjing. Microstructure and Characteristics of Nanocrystalline TiO2 Thin Films for Photoelectrochromic Devices[J]. Acta Optica Sinica, 2003, 23(12): 502-1506
Authors:Tang JieyingZhang XupingMeng Lili Key Laboratory of Micro-Electro-Mechanical Systems of Education Ministry of China  Southeast University  Nanjing Research Center of Optical Communication Engineering  Nanjing University  Nanjing
Affiliation:Tang Jieying~1Zhang Xuping~2Meng Lili~11 Key Laboratory of Micro-Electro-Mechanical Systems of Education Ministry of China,Southeast University,Nanjing 2100962 Research Center of Optical Communication Engineering,Nanjing University,Nanjing 210093
Abstract:The nanocrystalline TiO_2 thin films plays an important role in the photoelectrochromic devices. The microstructure of nanocrystalline TiO_2 has effects on the properties of absorption of dyes, diffraction of light and transportation of charges. Nanocrystalline TiO_2 thin films were prepared by the electron beam evaporation. The surface morphology, crystal state and composition were analyzed with atomic force microscope (AFM), X-ray diffraction (XRD) and Auger electronic spectroscopy (AES). The photoelectric performances affected by particle size were discussed theoretically. And the blue-shift phenomenon of the absorption peak value was explained by quantum confinement effect.
Keywords:thin film physics  photoelectrochromic device  nanocrystalline  titanium oxide  micro-structure
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