| ZnO掺杂TiO2厚膜的sol-gel法制备及气敏特性研究 |
| |
| 引用本文： | 高净,潘国峰,张东岭,刘玉岭,王娜.ZnO掺杂TiO2厚膜的sol-gel法制备及气敏特性研究[J].电子元件与材料,2011,30(10):35-39. |
| |
| 作者姓名： | 高净 潘国峰 张东岭 刘玉岭 王娜 |
| |
| 作者单位： | 1. 河北工业大学信息工程学院,天津,300130
2. 河北工业大学,天津,300130 |
| |
| 基金项目： | 国家科技重大专项课题资助项目(No.2009ZX02308—004); 国家自然科学基金资助项目(No.60972106) |
| |
| 摘 要： | 利用钛酸丁酯与无水乙醇的水解反应制备了纳米TiO2厚膜,并对其进行了不同含量的ZnO掺杂和不同温度的退火.通过XRD和SEM对所制备的ZnO-TiO2纳米粉的物相结构和表面微观形貌进行了表征,利用气敏元件测试系统对用其制备的气敏元件的气敏特性进行了检测,研究了ZnO的掺杂量和退火温度对TiO2厚膜气敏性能的影响,并对T...
|
| 关 键 词： | 气敏传感器 sol-gel法 TiO2厚膜 灵敏度 退火温度 |
Study on gas sensing properties of ZnO-doped TiO_2 thick films prepared by sol-gel method |
| |
| GAO Jing,PAN Guofeng,ZHANG Dongling,LIU Yuling,WANG Na.Study on gas sensing properties of ZnO-doped TiO_2 thick films prepared by sol-gel method[J].Electronic Components & Materials,2011,30(10):35-39. |
| |
| Authors: | GAO Jing PAN Guofeng ZHANG Dongling LIU Yuling WANG Na |
| |
| Institution: | GAO Jing1,PAN Guofeng1,ZHANG Dongling2,LIU Yuling1,WANG Na1(1.School of Information Engineering,Hebei University of Technology,Tianjin 300130,China,2.Hebei University of Technology,China) |
| |
| Abstract: | Nano-TiO2 thick films were prepared by hydrolysis of the Ti(OC4H9)4 and CH3CH2OH,then the samples were doped with different amounts of ZnO and annealed at different temperatures.The phase structure and surface morphology of the prepared ZnO-TiO2 namo-powders were characterized using XRD and SEM.The gas sensing properties of the gas sensors prepared by using the samples were detected by the gas sensor test system.The effects of the doping amount of ZnO and the annealing temperature on the gas sensing propert... |
| |
| Keywords: | gas sensors sol-gel method TiO2 thick films sensitivity annealing temperature |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
