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Zur Anwendung der Sondendiagnostik in einem polymerisierenden Plasma
Authors:S Klagge
Abstract:On the example of the Ne glow discharge with a benzol admixture the possibility of applicating the probe diagnostic in polymerizing plasmas is investigated. Heating the probe at 900°C stetady values for the floating potential, the probe characteristic and its second derivation are obtained. The variation with time of these quantities without heating the probe yields informations about the rate of polymerization. The effect of a benzol admixture from 1% to 20% on the energy distribution function of electrons and the plasma parameters in the tube axis is pointed out. From the second derivation of the characteristic at emissive probe conditions it is possible to deduce in addition to the space potential the influence of the benzol admixture on the ionization mechanism.
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