| 热释电薄膜在红外探测器中的应用 |
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| 引用本文： | 吴传贵,刘兴钊,张万里,李言荣.热释电薄膜在红外探测器中的应用[J].红外,2004,22(3):5-9. |
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| 作者姓名： | 吴传贵 刘兴钊 张万里 李言荣 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 介绍了热释电效应及热释电薄膜红外探测器的工作模式，特别是探测器单元对热释电薄膜的材料与低温生长要求。为了克服薄膜生长过程中较高的基片温度对读出集成电路(ROIC)的破坏性影响，一方面发展了离子束辅助沉积、外延缓冲层等多种低温生长技术，另一方面发展了复合探测器结构设计。已研制出了性能良好的铁电薄膜非制冷红外焦平面阵列，其噪声等效温差(NEDT)可达20mK。
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| 关 键 词： | 铁电薄膜 热释电效应 非制冷红外焦平面阵列 低温生长 红外探测器 离子束辅助沉积 外延缓冲层 |
Application of Pyroelectric Thin Films in Infrared Detectors |
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| WU Chuangui LIU Xingzhao ZHANG Wanli LI Yanrong.Application of Pyroelectric Thin Films in Infrared Detectors[J].Infrared,2004,22(3):5-9. |
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| Authors: | WU Chuangui LIU Xingzhao ZHANG Wanli LI Yanrong |
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| Abstract: | The pyroelectric effect and the operating modes of infrared detectors using ferroelectric thin films are described. The key technology of low temperature integration of pyroelectric thin film onto Si-reacl-out integrated circuits and the requirements for pyroelectric thin film are summarized. Through the development of low temperature growth of ferroelectric thin films (e.g. ion beam assisted deposition, buffer layer insertion) and composite element design, a pyroelectric thin film infrared detector with good performance has been developed. |
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| Keywords: | ferroelectric thin film pyroelectric uncooled infrared focal plane array low temperature deposition |
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