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| 基于波面剪切干涉原理测量微细台阶高度 | |
| 引用本文： | 惠梅,邓年茂,杨佩原,赵跃进. 基于波面剪切干涉原理测量微细台阶高度[J]. 光学技术, 2008, 34(2): 244-245 |
| 作者姓名： | 惠梅 邓年茂 杨佩原 赵跃进 |
| 作者单位： | 1. 北京理工大学,信息科学技术学院光电工程系,北京,100081 2. 北京控制与电子技术研究所,北京,100038 3. 中国兵器科学研究院,北京,100089 |
| 摘 要： | 提出了利用波面剪切干涉原理测量微细结构台阶高度的方法。通过在微分相衬干涉系统光路中加入偏振分光棱镜,实现了对光束的微分剪切及复合偏振。利用矩阵分析法建立了该测量系统的数学模型,根据探测到的光强信息图,由光强与干涉相位差间的关系式提取到了测量区域的相位分布值,由位相与待测物纵向深度间的转换关系式,经图像重建后通过计算得到了台阶的表面高度信息。 |
| 关 键 词： | 波面剪切 台阶高度 偏振干涉 波面剪切 分光棱镜 |
| 文章编号： | 1002-1582(2008)02-0244-02 |
| 修稿时间： | 2007-01-11 |
The measurement of step height micro-topography based on wave cutting interference theory |
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| HUI Mei,DENG Nian-mao,YANG Pei-yuan,ZHAO Yue-jin. The measurement of step height micro-topography based on wave cutting interference theory[J]. Optical Technique, 2008, 34(2): 244-245 | |
| Authors: | HUI Mei DENG Nian-mao YANG Pei-yuan ZHAO Yue-jin |
| Abstract: | The measurement of micro-topography surface based on wave cutting interference theory is described.Beam splitter prism realizes the differential cutting and complex polarization.Math model is established based on matrix analyze.The phase distributing is obtained according to the relationship of intensity and phase,the value of micro-topography surface is obtained after image manipulation.Some technical difficulties existed in the surface microscopy are analyzed and solved. |
| Keywords: | wave cutting polarization interference double refraction beam splitter prism micro-topography surface |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |