Improvement of 1.3-μm GaInNAs Vertical Cavity Surface Emitting Lasers Grown by MOVPE

We report the improved performance of the conventional contact 1.3 #m GalnNAs vertical cavity surface emitting lasers (VCSELs) grown by metal-organic vapour-phase epitaxy (MOVPE). A new wet etching approach was applied in the fabrication of 1.3μm GaInNAs oxide-confined VCSELs. The threshold current of single mode device is 1.0mA. The multiple mode devices show very low threshold currents below 2 mA at 5-85℃, which were the best results for 1.3μm GaInNAs VCSELs reported. Maximum single mode output power of 0.256mW and the maximum multiple mode power of 0.883mW were obtained at room temperature.