Low-temperature direct wafer bonding of GaAs/InP |
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Authors: | Sheng Xie Songyan Chen Weilian Guo Luhong Mao |
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Institution: | 1. School of Electronic Information Engineer, Tianjin University, Tianjin, 300072, PR China;2. Department of Physics, Xiamen University, Xiamen, 361005, PR China |
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Abstract: | An approach for low-temperature direct wafer bonding of GaAs/InP was presented. The bonding procedure was carried out at temperatures from 350 to 500 °C, and the bonded n-GaAs/n-InP specimens were obtained even at a temperature as low as 350 °C. The compositional profile on the GaAs/InP heterointerface was studied by X-ray photoelectron spectroscopy. The bonded interfacial properties were also characterized by current–voltage (I–V) and bonding strength measurement. The experimental results revealed an InGaAsP (or/and InGaAs) interlayer formed at the bonded interface, which influences the electrical property as well as the bonding strength. For the specimen bonded at 350 °C, the transport of major carriers could be explained by a tunneling effect. But the carrier transport was described by the thermionic emission theory for the specimen bonded at 450 °C. Finally, the mechanism of GaAs/InP bonding was discussed. |
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Keywords: | Low-temperature bonding Interfacial composition I&ndash V V characteristic Bonding mechanism |
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