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| 基于白光干涉术的微器件三维表面形貌恢复研究 | |
| 引用本文： | 申路,王宇华,杨永强.基于白光干涉术的微器件三维表面形貌恢复研究[J].佛山科学技术学院学报(自然科学版),2012,30(4):36-40. |
| 作者姓名： | 申路 王宇华 杨永强 |
| 作者单位： | 1. 佛山科学技术学院机电工程系,广东佛山528000／华南理工大学机械与汽车工程学院,广东广州510640 2. 佛山科学技术学院机电工程系,广东佛山,528000 3. 华南理工大学机械与汽车工程学院,广东广州,510640 |
| 摘 要： | 白光干涉测量技术是光学测量中一种非常重要的方法。介绍了白光干涉测量的原理及系统构成,提出了基于局部峰点插值提取白光干涉信号包络的算法。对局部峰点插值提取包络算法的实现和数据处理的过程进行了讨论,得到了清晰的三维表面形貌图像。 |
| 关 键 词： | 白光干涉 包络线 三维表面形貌 |
The recovery of the 3D surface profile of micro device through white-light interference |
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| SHEN Lu,WANG Yu-hua,YANG Yong-qiang.The recovery of the 3D surface profile of micro device through white-light interference[J].Journal of Foshan University(Natural Science Edition),2012,30(4):36-40. | |
| Authors: | SHEN Lu WANG Yu-hua YANG Yong-qiang |
| Institution: | 1.Department of Mechatroniccs Engineering,Foshan University,Foshan 528000,China;2.School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510640,China) |
| Abstract: | White-light interference measurement is a very important method in optical measurement.In addition to the emphatical discussion of the process of this method conduction and related data processing,this paper introducedthe principle and the system of white-light interference measurement technology and proposed the method for the extraction of white-light interference signal envelop based on the interpolation of the local peak point.3D surface profile images can be obtained through this |
| Keywords: | white-light interference envelope 3D surface profile |
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