| Abstract: | The method described is based on the fact that the measurement of particles in the gaseous phase is generally easier than that in the liquid phase for fine particles smaller than 1 μm in diameter. The system consists of a liquid nebulizing unit, evaporator, condenser, mixing diluter and two different aerosol sizing instruments. It has been found that this method can continuously detect particulate impurities in ultrapure water in situ and can measure the size distribution of fine powders in the submicron particle size range down to about 0.05 μm. |
