| 分振幅干涉法测量波面误差的检测技术现状及发展趋势 |
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| 引用本文： | 赵华伟,王军. 分振幅干涉法测量波面误差的检测技术现状及发展趋势[J]. 应用光学, 1991, 0(3) |
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| 作者姓名： | 赵华伟 王军 |
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| 作者单位： | 西安应用光学研究所，西安应用光学研究所 |
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| 摘 要： | 光学波面误差的分振幅干涉法检测技术目前十分活跃。本文简明地叙述了分振幅干涉法测量波面误差的检测技术现状及今后的发展趋势。
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| 关 键 词： | 分振幅干涉 波面误差 |
Inspection Technique Status and Developing Trend of Wave Surface Error Measured with Component Amplitude Interferometry |
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| Zhao Huawei Wang Jun. Inspection Technique Status and Developing Trend of Wave Surface Error Measured with Component Amplitude Interferometry[J]. Journal of Applied Optics, 1991, 0(3) |
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| Authors: | Zhao Huawei Wang Jun |
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| Affiliation: | Xian Institute of Applied Optics |
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| Abstract: | The component amplitude interferometry is frequently used for inspectingthe optical wave surface error at present.The inspection technique status anddeveloping trend are briefly described in the paper. |
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| Keywords: | component amplitude interferometry wave surface error |
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