Structural and Optical Properties of Sol-Gel Deposited Proton Conducting Ta2O5 Films

Proton conducting tantalum oxide films were deposited on ITO (Indium Tin Oxide) coated glass, fused silica and soda-lime glass substrates by spin coating using a sol-gel process. The coating solutions were prepared using Ta(OC₂H₅)₅ as a precursor. X-ray diffraction studies determined that the sol-gel films, heat treated at temperatures below 400°C, were amorphous. Films heat treated at higher temperatures were crystalline with the hexagonal δ-Ta₂O₅ structure. The solar transmission values (T _s ) of tantala films on glass generally range from 0.8–0.9, depending on thickness. The refractive index and the extinction coefficient were evaluated from transmittance characteristics in the UV-VIS-NIR regions. The refractive index values calculated at λ=550 nm increased fromn=1.78 to 1.97 with increasing heat treatment from 150 to 450°C. The films heat treated at different temperatures showed low absorption, with extinction coefficients of smaller thank=1×10⁻³ in the visible range. Impedance spectroscopic investigations performed on Ta₂O₅ films revealed that these films have a protonic conductivity of 3.2×10⁻⁴S/m. The films are suitable for proton conducting layers in electrochromic (EC) devices.