| 用半导体激光器实现高精度动态定位 |
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| 引用本文： | 韩劲松 赵洋. 用半导体激光器实现高精度动态定位[J]. 光学学报, 1995, 15(12): 730-1734 |
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| 作者姓名： | 韩劲松 赵洋 |
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| 作者单位： | 清华大学精密仪器系 |
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| 摘 要： | 提出了一种新的半激光定位技术，把半导体激光器的线性调频特性和双波长细分技术结合起来，用两个半导体激光器完成了零点的高精度动态定位，突破了传统白光定位的局限，简化了干涉仪的设计，实现了大范围的零点捕捉。定位精度达到０．０１μｍ。
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| 关 键 词： | 半导体激光器 动态定位 线性调频 双波长细分 |
| 收稿时间： | 1994-10-26 |
Research on High Accuracy Dynamic Positioning Using Diode Lasers |
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| Han Jinsong, Zhao Yang, Li Dacheng, Cao Mang, Wang Jia. Research on High Accuracy Dynamic Positioning Using Diode Lasers[J]. Acta Optica Sinica, 1995, 15(12): 730-1734 |
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| Authors: | Han Jinsong Zhao Yang Li Dacheng Cao Mang Wang Jia |
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| Abstract: | A new zero optical path difference (OPD) point positioning technique using diode lasers is proposed in this poper. With the linear frequency modeulation property of a diode laser and the technique of dual-wavelength refinemenr, the zero OPD point of a interferometer is dynamically searched with a very high accuracy of 0. 01 micrometer. Compared to that of the traditional white light positioning, the interferometer of diode laser positioning is simplified, and the searching range of the zero OPD point has been increased greatly. |
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| Keywords: | diode laser dynamic positioning linear frequency modulation dualwavelength refinement. |
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