Volatile β-diketonato Complexes of Ruthenium,Palladium and Platinum. Preparation and Thermal Characterization |
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| Authors: | Lashdaf M. Hatanpää T. Tiitta M. |
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| Affiliation: | (1) Volatec Oy, Linnankoskenkatu 34, FIN-06100 Porvoo, Finland;(2) Department of Chemistry, University of Helsinki, Laboratory of Inorganic Chemistry, P. O. Box 6, FIN-00014 Helsinki, Finland;(3) Oil Research, Fortum Oil and Gas, P.O. Box 310, 06101 Porvoo, Finland |
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| Abstract: | Ruthenium, palladium and platinum complexes of 2,2,6,6-tetramethyl-3,5-heptanedione (thd) and ruthenium tris acetylacetonate (acac) were synthetized and studied with TG, DTA, DSC and MS methods. Thermal properties of ruthenocene were also studied. The platinum thd complex has the highest volatility despite the second highest molecular mass of the complex. All the complexes sublimed under reduced pressure. Ru(acac)3 decomposed during sublimation under atmospheric pressure of nitrogen whereas the other compounds studied sublimed also under these conditions. Pd(thd)2 reduced under atmospheric pressure of H2 /N2 (5% H2 ) whereas the ruthenium complexes were not reduced. The field desorption mass spectra of complexes showed only the molecular peaks and no fragmentation occurred. This revised version was published online in July 2006 with corrections to the Cover Date. |
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| Keywords: | atomic layer epitaxy catalyst precursor chemical vapor deposition decomposition diketonate platinum palladium reduction ruthenium ruthenocene sublimation |
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