交直流隔离的分布式MEMS移相器设计

设计了一种五位分布式微电子机械系统（MEMS）移相器,通过分析对比传统分布式MEMS移相器加载直流偏置的两种方式,提出了一种新的直流偏置的加载方式,能解决传统方式带来的交直流干扰和引线繁杂问题,同时工艺容易实现。采用ADS软件对移相器进行级联仿真,优化了微波性能参数,仿真得出移相器在35 GHz时移相精确度小于3°,移相器的插入损耗小于0.5 dB,回波损耗大于23 dB。给出了五位分布式MEMS移相器的工艺流程,同时验证了所设计加载直流偏置方式工艺简单的优势。

Design for an AC-DC isolated distributed MEMS phase shifter

A 5-bit distributed Micro Electro Mechanical System（MEMS） phase shifter is designed.Based on the analysis of two different loading DC bias ways of traditional distributed MEMS phase shifter,a new loading DC bias method is put forward to resolve the problems in traditional way.The new method with simple process can separate AC and DC and avoid the complexity of wiring.Phase shifter’s microwave performance parameters are obtained and optimized through software ADS.Simulation results show that the phase shifter’s phase error is less than 3°,the insertion loss less than 0.5 dB,and the return loss more than 23 dB at 35 GHz.The performance has met the requirements.The process flow of five-bit distributed MEMS phase shifter is introduced,the advantages of simple process for the new loading DC bias method is verified.