Experimental investigation of a modified Beckmann-Kirchhoff scattering theory for the in-process optical measurement of surface quality |
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Authors: | Ruipeng Guo |
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Affiliation: | School of Electronic, Information and Electrical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, PR China |
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Abstract: | An experimental investigation of a modified Beckmann-Kirchhoff scattering theory applied in an in-process optical measurement of surface quality is described. The proposed theory describes the scattered light intensity distribution from a surface with the additional layers, and can be employed to analyze the surface characteristics in in-process measurement. Based on light scattering principle and machine vision method, the surface roughness is extracted to testify the correction of the modified Beckmann-Kirchhoff scattering theory. The experimental apparatus consists of a collimated laser diode, a beam splitter, a screen, a measuring lens and a camera. Test specimens with different surface roughness are studied. The results obtained demonstrate the feasibility of in-process optical measurement of surface quality using the modified model. |
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Keywords: | Beckmann theory Light scattering Surface roughness Optical measurement In-process |
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