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Subsurface quality of polished SiO2 surface evaluated by quasi-Brewster angle technique |
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| Authors: | Bin Ma Zhengxiang Shen Pengfei He Tian Sang Hongfei Jiao Huasong Liu Dandan Liu Zhanshan Wang |
| Institution: | a Institute of Precision Optical Engineering, Tongji University, No. 1239 Siping Road, Shanghai 200092, China b School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, China c Tianjin Key Laboratory of Optical Thin Films, Tianjin Jinhang Institute of Technical Physics, Tianjin 300192, China d Department of Physics, Qiannan Normal College for Nationalities, Duyun 558000, China |
| Abstract: | As a surface-sensitive optical method, the quasi-Brewster angle technique is extended to evaluate the subsurface qualities of quartz crystal and fused silica. By measuring the ellipsometry parameters at λ = 900 nm with variable incidence angle, a fitting process is executed using a proper subsurface nanostructure with an exponential porosity distribution. The fitting results predict the surface and subsurface information which are in good agreement with that of the Zygo interference microscope measurements and etching methods. In addition, the shift characteristics of phase change at the Brewster angle of such crystal and non-crystal material are compared and demonstrated. |
| Keywords: | Subsurface damage Quasi-Brewster angle technique Ellipsometry parameters |
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