| 基于强度干涉原理的双光路动态测量方法 |
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| 引用本文： | 王亮,李庆祥,李玉和,陈张玮. 基于强度干涉原理的双光路动态测量方法[J]. 光学技术, 2006, 32(4): 618-620 |
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| 作者姓名： | 王亮 李庆祥 李玉和 陈张玮 |
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| 作者单位： | 清华大学精密测试技术及仪器国家重点实验室 北京100084 |
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| 摘 要： | 在近场光存储方案中,头盘间距动态测控技术是近场光存储理论和技术的实用化。根据近场光学头的飞行特点,提出了一种基于光强干涉原理的测量系统,重点介绍了其测量原理和标定方法。采用双光路结构来提高测量分辨率,利用光偏振特性来消除反馈光对信号光的干扰。通过对系统性能的分析和试验表明,动态特性达到了500kHz,测量分辨率高于1nm,可满足系统高精度动态测试的要求。
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| 关 键 词： | 光学测量 飞行高度 双光路 光强 |
| 文章编号： | 1002-1582(2006)04-0618-03 |
| 收稿时间： | 2005-06-17 |
| 修稿时间： | 2005-06-17 |
Dual-pass optical dynamic measuring method based on intensity interference principle |
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| WANG Liang,LI Qing-xiang,LI Yu-he,CHEN Zhang-wei. Dual-pass optical dynamic measuring method based on intensity interference principle[J]. Optical Technique, 2006, 32(4): 618-620 |
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| Authors: | WANG Liang LI Qing-xiang LI Yu-he CHEN Zhang-wei |
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| Abstract: | In near-field optical storage,dynamic flying height measuring technique is a key of the theory and its application.Light intensity interference principle and calibration steps are detailed.The measurement resolution was improved by means of dual optical path arrangement.The disturbance caused by feedback light was reproved by using polarization of light.Analysis and experiment prove that this method has a measuring resolution of 1nm,and dynamic frequency of 500 kHz.These parameters enable high-resolution dynamic measurement of spacing between the flying head and disk. |
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| Keywords: | optical measurement flying height dual optical path light intensity |
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