Collisional-radiative model for non-Maxwellian inductively coupled argon plasmas using detailed fine-structure relativistic distorted-wave cross sections

Our recently developed collisional-radiative model which included fine-structure cross sections calculated with a fully relativistic distorted-wave method [R.K. Gangwar, L. Sharma, R. Srivastava, A.D. Stauffer, J. Appl. Phys. 111, 053307 (2012)] has been extended to study non-Maxwellian inductively coupled argon plasmas. We have added more processes to our earlier collisional-radiative model by further incorporating relativistic distorted-wave electron impact cross sections from the 3p ⁵4sJ = 0, 2 metastable states, (1s ₃, 1s ₅ in Paschen’s notation) to the 3p ⁵5p (3p _i ) excited states. The population of various excited levels at different pressures in the range of 1–25 mTorr for an inductively coupled argon plasma have been calculated and compared with the recent optical absorption spectroscopy measurements as well as emission model results of Boffard et al. [Plasma Sources Sci. Technol. 19, 065001 (2010)]. We have also calculated the intensities of two emission lines, 420.1 nm (3p ₉ → 1s ₅) and 419.8 nm (3p ₅ → 1s ₄) and compared with measured intensities reported by Boffard et al. [J. Phys. D 45, 045201 (2012)]. Our results are in good agreement with the measurements.