Simulation and Evaluation of the Silicon-Micromachined Columns for Gas Chromatography

In this paper, the impact of airflow velocity and pressure in the two popular configuration gas chromatography (GC) column channels (the serpentine channel and the spiral channel) was simulated and evaluated using ANSYS dynamic analysis. The simulated result of airflow velocity and pressure distribution in the Gas chromatography (GC) channel shows that the impact in the spiral channel corner is smaller than that in the serpentine channel corner. So, the spiral channel columns were fabricated based on the MEMS technology and the stationary phase OV‐1 was coated using a dynamic procedure. The separation performance of the 3 m non‐polar GC column shows perfect separation efficiency for the non‐polar components, the microfabricated GC column yields 7100 theoretical plate, and the analysis time is less than 200 s.