On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide |
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Authors: | Lai Wei-Cheng Chakravarty Swapnajit Wang Xiaolong Lin Cheyun Chen Ray T |
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Affiliation: | Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, Texas 78712, USA. |
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Abstract: | We demonstrate a 300?μm long silicon photonic crystal (PC) slot waveguide device for on-chip near-infrared absorption spectroscopy, based on the Beer-Lambert law for the detection of methane gas. The device combines slow light in a PC waveguide with high electric field intensity in a low-index 90?nm wide slot, which effectively increases the optical absorption path length. A methane concentration of 100?ppm (parts per million) in nitrogen was measured. |
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