Three-dimensional STEM for observing nanostructures |
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| Authors: | Koguchi M Kakibayashi H Tsuneta R Yamaoka M Niino T Tanaka N Kase K Iwaki M |
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| Affiliation: | Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo, Japan. Masanari-crl.Koguchi@c-net3.crl.hitachi.co.jp |
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| Abstract: | A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode. |
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