| 高频离子源等离子体的光谱诊断 |
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| 引用本文： | 唐平瀛, 刘铁, 丁伯南, 等. 高频离子源等离子体的光谱诊断[J]. 强激光与粒子束, 2003, 15(03). |
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| 作者姓名： | 唐平瀛 刘铁 丁伯南 戴晶怡 |
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| 作者单位： | 1.中国工程物理研究院 电子工程研究所, 四川 绵阳 621 900;;;2.中国工程物理研究院, 四川 绵阳 621 900 |
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| 摘 要： | 采用发射光谱法研究了高频离子源的等离子体性质。该离子源应用于ZF-200keV中子发生器中，是一种电感耦合型无极环形放电高频离子源。实验采用绝对定标后的光学多道分析系统测定了离子源等离子体在不同阶段氢原子巴耳末谱线系中前三条谱线的强度，并采用部分局部热力学平衡状态的理论，计算出了相应阶段高频离子源等离子体的电子温度、氢原子浓度、氢离子浓度等参数，并进行了简要分析。
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| 关 键 词： | 离子源 等离子体 发射光谱 |
Spectroscopic diagnosis of RF ion source plasma |
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| tang ping ying, liu tie, ding bo nan, et al. Spectroscopic diagnosis of RF ion source plasma[J]. High Power Laser and Particle Beams, 2003, 15. |
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| Authors: | tang ping ying liu tie ding bo nan dai jing yi |
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| Affiliation: | 1. Institute of Electronic Engineering,CAEP,P.O.Box 919 523,Mianyang 621900,China;;;2. China Academy of Engineering Physics,Mianyang 621900,China |
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| Abstract: | Plasma characteristics of an RF ion source were investigated by emission spectroscopy. The RF ion source, applied in ZF 200keV neutron generator, is an orbicular discharge RF ion source coupled with inductance. The spectral line intensities of the first three atomic lines in hydrogen Balmer series in different moment of RF ion source plasma, were measured with calibrated optical multichannel analyzer. Some plasma parameters in relevant time, including electron temperature, hydrogen atom density and hydrogen ion density, were calculated and analyzed using partial local thermodynamic equilibrium theory. |
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| Keywords: | ion source plasma emission spectra |
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