Metal-atom concentration formation in a hollow-cathode discharge |
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| Authors: | V. V. Kuchinskii E. G. Sheikin |
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| Affiliation: | (1) Leningrad University, USSR |
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| Abstract: | Monte Carlo methods have been applied to the concentration pattern in a hollowcathode discharge, and approximate formulas are derived for the concentrations of the sputtered and/or evaporated atoms. Some standard experimental relationships for the sputtered concentrations are explained.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 3, pp. 92–96, March, 1989. |
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