| 谐振腔增强型光电探测器的角度相关特性研究 |
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| 引用本文： | 梁琨,杨晓红,杜云,吴荣汉.谐振腔增强型光电探测器的角度相关特性研究[J].光子学报,2003,32(5):637-640. |
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| 作者姓名： | 梁琨 杨晓红 杜云 吴荣汉 |
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| 作者单位： | 中国科学院半导体研究所,国家集成光电子学国家重点联合实验室,北京,100083 |
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| 基金项目： | SupportedbytheNationalNaturalScienceFoundationofChina(GrantNo.60 13 70 2 0 )andtheNationalFundamentalResearchandDevelopmentProgramofChina(G2 0 0 0 0 3 660 3 ) |
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| 摘 要： | 采用MBE生长In0.3Ga0.7As/GaAs和GaInNAs/GaAs量子阱为有源区的器件结构材料,制备出工作在1060nm及1310nm波段的谐振腔增强型光电探测器.对谐振腔增强型光电探测器的空间角度相关特性进行了实验与物理分析,改变光束入射角度,器件谐振接收波长可在大范围调变.
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| 关 键 词： | GaInNAs 谐振腔增强型探测器 空间角度相关调谐 |
| 收稿时间： | 2002-07-12 |
The Incident Angle Dependence of Quantum Efficiency of GaAs Based RCE Photodetectors |
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| Abstract.The Incident Angle Dependence of Quantum Efficiency of GaAs Based RCE Photodetectors[J].Acta Photonica Sinica,2003,32(5):637-640. |
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| Authors: | Abstract |
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| Institution: | State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, China |
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| Abstract: | The theoretical analysis and experimental measurement on the incident angle dependence of quantum efficiency of GaAs based resonant cavity enhanced (RCE) photodetector is presented. By changing the angle of incoming light, about 40 nm wavelength variation of peak quantum efficiency is obtained. The peak quantum efficiency and optical bandwidth at different mode corresponding to different angle incidence is characterized with different absorption dependence on wavelength. The convenient angle tuning of resonant mode will be helpful to relax the strict constraint of RCE photodetector to light source with narrow emission spectrum such applications in space optical detections and communications. |
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| Keywords: | GaInNAs Resonant cavity enhanced photodetectors Angle-selected tuning |
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