| 激光烧蚀聚合物技术及其应用 |
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| 引用本文： | 宋登元.激光烧蚀聚合物技术及其应用[J].激光与红外,1993(1). |
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| 作者姓名： | 宋登元 |
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| 作者单位： | 河北大学电子系 保定 |
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| 摘 要： | 激光烧蚀聚合物技术在微电子学器件的图形加工和医学的显微外科中有极其广阔的应用前景。本文概述了激光烧蚀聚合物的动力学模型、能量传递过程及其反应附产物的形式,同时介绍了这种技术的应用现状。
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| 关 键 词： | 光烧蚀 聚合物 图形加工 显微外科 |
Techniques and Applications of Ultraviolet Laser Photoablation of Polymers |
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| Song Dengyuan.Techniques and Applications of Ultraviolet Laser Photoablation of Polymers[J].Laser & Infrared,1993(1). |
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| Authors: | Song Dengyuan |
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| Abstract: | The techniques of ultraviolet laser photoablation of polymers have been shown to be useful for a wide rang of applications, for example, pattern processing in device fabrication of microelectronics and microsurgery in medical areas. In this paper, the dynamic models, energy transmission processes, ablation thresholds and photolysis products for photoablation of polymers are reviewed. Recent development in applications is also described. |
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| Keywords: | photoablation polymer pattern processing microsurgery |
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