蒙特卡罗模拟在辉光放电鞘层离子输运研究中的应用

利用蒙特卡罗方法模拟氩气直流辉光放电鞘层内离子的运动过程.模拟基于离子与中性原子的电荷转移和弹性散射两种主要的散射过程，考虑了碰撞截面与能量相关和不相关两种情况，在弹性散射中采用了势场相互作用模型和刚性球碰撞两种模型.通过模拟得到不同气压和不同放电电压下离子入射阴极的能量分布和角度分布，并对几种模型的模拟结果进行了比较和讨论. 关键词： 辉光放电 等离子体鞘层 蒙特卡罗模拟

Application of Monte Carlo simulation to the research of ions transport plasma sheaths of glow discharge

In this paper, Monte Carlo method was used to simulate the motion of ions in t he cathode fall zone of glow discharge. Energy distributions and angle distribu tions at different pressures and voltages are presented. The simulations are b ased on two main scattering processes of charge transfer and elastic scattering. Either the ion energy dependence or independence of collision cross-section s is taken into account. For elastic scattering, the potential interactio n and hard-sphere models are considered. The parameter Pd c has a great in fluence o n the energy distribution, but the angle distribution of ions is not sensitive t o di scharge parameters. Simulation results obtained by different models have been co mpared and discussed. The model that includes charge transfer and potential inte raction scattering processes and is based on the dependence of collision cross- section on the ion energy is obviously the best.