| 利用Mirau型相关显微镜进行面型检测的研究 |
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| 引用本文： | 陈侦,王桂英,王之江.利用Mirau型相关显微镜进行面型检测的研究[J].中国激光,1999,26(8):706-710. |
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| 作者姓名： | 陈侦 王桂英 王之江 |
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| 作者单位： | 中国科学院上海光机所,上海,201800 |
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| 基金项目： | 国家自然科学基金,中国科学院基金 |
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| 摘 要： | 在Ｍｉｒａｕ型干涉仪的基础上，利用相关检测的原理，实现了Ｍｉｒａｕ型相关面型检测仪。通过该面型检测技术，克服了移相显微干涉（ＰＳＭＩ）面型检测系统中纵向分辨能力受衍射效应制约这一限制，正确测量了面型的纵向尺度。
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| 关 键 词： | 相关显微镜，面型检测，纵向分辨能力 |
| 收稿时间： | 1998/3/5 |
Study of Surface Topographic Measurement by a Mirau Correlation Microscope |
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| Chen Zhen,Wang Guiying,Wang Zhijiang.Study of Surface Topographic Measurement by a Mirau Correlation Microscope[J].Chinese Journal of Lasers,1999,26(8):706-710. |
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| Authors: | Chen Zhen Wang Guiying Wang Zhijiang |
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| Abstract: | A surface profile system based on a Mirau interferometer is described which uses the correlation method. This method may overcome the difficulty encountered in a PSMI profiler, in which the vertical response is limited by the diffraction effect of the objective. The system gives the accurate vertical scale of the measured surface. |
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| Keywords: | correlation microscope surface topology vertical resolution |
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