Concentrations of Active Species in the Flowing Afterglow of a Nitrogen Microwave Plasma |
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Authors: | Diamy A-M Hochard L Legrand J-C Ricard A |
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Institution: | (1) Laboratoire de Chimie des Surfaces, CNRS URA 1428, Université Pierre et Marie Curie, Case 196, 4 place Jussieu, 75252 Paris Cedex 05, France;(2) Laboratoire de Physique des Gaz et des Plasmas, CNRS URA 73, Université de Paris Sud, bât. 212, 91405 Orsay Cedex, France;(3) Centre Plasmas et Applications, CNRS ESA 5002, Université Paul Sabatier, 118 route de Narbonne, 31062 Toulouse Cedex, France |
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Abstract: | Measurements of nitrogen atom density, by means of NO chemical titration, along with an evaluation of the densities of some excited species N
2
(B, v=11), N
2
(B, v=2), N
2
(C, v=0), and N
2
+
(B,v=0), by means of a spectroscopic study of some bands of dinitrogen, are achieved along the flowing afterglow of a dinitrogen microwave plasma (2450 MHz) for several pressures. The concentrations obtained are in the following range: N] 10
+15
, N
2
(B, 2)] 10
+9
–10
+10
, N
2
(B, 11)] 10
+8
–10
+9
, N
2
(C, 0)] 10
+6
–10
+7
, N
2
+
(B,0)] 10
+6
-10
+8
(cm-3). From a kinetic study of the formation and decay of excited and charged species, an estimation of N
2
(A, v), N
2
(X, v, and N
2
+
(X) densities can be derived: N
2
(A, v)] 10
+12
, N
2
(X, v 6)] 10
+15
–10
+16
, N
2
(X, v 12)] 10
+14
–10
+15
, N
2
+
(X)] 10
+10
(cm
-3
). |
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Keywords: | Nitrogen afterglow microwave discharge nitrogen atom concentration metastable nitrogen molecule concentration |
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