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CO2 laser-induced plasma CVD synthesis of diamond |
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| Authors: | V.I. Konov A.M. Prokhorov S.A. Uglov A.P. Bolshakov I.A. Leontiev F. Dausinger H. Hügel B. Angstenberger G. Sepold S. Metev |
| Affiliation: | (1) General Physics Institute, Vavilov Str. 38, 117942 Moscow, Russia, RU;(2) Institute of High Power Beam Technology (IFSW), Stuttgart University, Pfaffenwaldring 43, D-70569 Stuttgart, Germany (Fax: +49-711/685-6842 or 7244), DE;(3) Bremen Institute of Applied Beam Technology, D-28800 Bremen 33, Klagenfurter Str. 2, Germany, DE |
| Abstract: | 2 laser maintenance of a stationary optical discharge in a gas stream, exhausting over a substrate into the air (laser plasmatron). Nano- and polycrystalline-diamond films were deposited on tungsten substrates from atmospheric-pressure Xe(Ar):H2:CH4 gas mixtures at flow rates of 2 ?/min. A 2.5-kW CO2 laser focused beam produced plasma. The deposition area was about 1 cm2 and growth rates were up to 30–50 μm/h. Peculiarities and advantages of laser plasmatrons are discussed. Received: 15 January 1998/Accepted: 16 January 1998 |
| Keywords: | PACS: 81.51.Gh+ 52.80.Tn |
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