Pd-gate MOS sensor for detection of methanol and propanol |
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| Authors: | Preeti Pandey J.K.Srivastava V.N.Mishra R.Dwivedi |
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| Affiliation: | a Center for Research in Microelectronics, Department of Electronics Engineering, Institute of Technology, Banaras Hindu University, Varanasi 221005, India |
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| Abstract: | The present paper focused on the detection of methanol and propanol using Pd-gate metal-oxide-semiconductor (MOS) sensor. Surface mor- phology and composition of the gate film were studied by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The response of the sensor for propanol and methanol was measured as shift in capacitance-voltage (C-V) and conductance-voltage (G-V) curves of the MOS structure. The sensitivity of the sensor towards methanol was found to be greater than that toward... |
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| Keywords: | MOS structure gas sensor palladium cracks sensitivity |
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