Phase-to-phase perovskite growth transformation in thin PZT films |
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| Authors: | I. P. Pronin E. Yu. Kaptelov S. V. Senkevich T. A. Shaplygina V. A. Klimov V. P. Pronin |
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| Affiliation: | (1) Department of Materials Science & Engineering, Faculty of Engineering, National University of Singapore, Singapore, 117574, Singapore; |
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| Abstract: | The structure and dielectric properties of thin lead zirconate titanate films grown ex situ on Pt/SiO2/Si substrates were studied. It was shown that with a crystallization temperature increase in the range of 540 to 580°C, the mechanism of perovskite phase growth changes and the ferroelectric parameters change according to this transformation. |
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