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Formation mechanism of InxGa1−xAs bridge layers on patterned GaAs substrates
Authors:S Iida  Y Hayakawa  T Koyama  M Kumagawa
Institution:

Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

Abstract:The formation mechanism of InxGa1?xAs (x=0.06) bridge layers on patterned GaAs (1 1 1)B substrates using liquid-phase epitaxy has been investigated. For this (i) the effect of density gradient in the solution on the formation of bridge layer and (ii) growth of bridge layer on left angle bracket1 1 0right-pointing angle bracket line-seed-substrates were studied. The convection induced by destabilizing density gradient in the solution led to an increase of lateral growth rate of the InGaAs bridge layers on a substrate mounted on the upper portion of the solution. However, it did not have any significant effect on the formation of the bridge layers. The formation of bridge layer on left angle bracket1 1 0right-pointing angle bracket line-seed-substrate took place only for the {1 1 1}B growth fronts, which indicated that “Berg effect” is responsible for the formation of bridge layers.
Keywords:InGaAs bridge layer  GaAs substrate  Liquid-phase epitaxy  Berg effect
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