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Differential algebraic method for arbitrary-order aberration analysis of combined electron beam focusing-deflection systems |
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| Authors: | L-P Wang T-T TangB-J Cheng JRA Cleaver |
| Institution: | a Microelectronics Research Centre, Cavendish Laboratory, Madingley Road, Cambridge CB3 0HE, UK b School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China |
| Abstract: | |
| Keywords: | Differential algebra automatic differentiation electron optics |
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